$CM_FORMAT JEOL/EO
$CM_VERSION 3.01
$CM_COMMENT 
$CM_DATE 2025-04-30
$CM_TIME 10:12:34
$CM_OPERATOR General
$CM_INSTRUMENT InTouchScope
$CM_ACCEL_VOLT 10
$CM_MAG 1000
$CM_SIGNAL BES
$CM_STAGE_POS -2.964 1.601 13.000 0.000 0.000
$CM_STAGE_X -2.964
$CM_STAGE_Y 1.601
$CM_STAGE_T 0.000
$CM_STAGE_Z 13.000
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 10m
$$SM_FILM_NUMBER 0
$$SM_TITLE 
$$SM_WD 11
$$SM_SPOT_SIZE 65
$$SM_VACUUM 40
$$SM_PHOTO ON
$$SM_MERGE 
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE LV
